Corrosion Resistant Dry Screw Vacuum Pump

The Yuzhen Corrosion Resistant Dry Screw Vacuum Pump is specifically designed for corrosive gases and complex processes. Its durable and stable internal structure, along with its oil-free design, reduces contamination, helping customers extend equipment lifespan and lower long-term operating costs.

Send Inquiry

Product Description

The Yuzhen Corrosion Resistant Dry Screw Vacuum Pump is well-suited for production processes involving acidic, corrosive, or special process gases. The screw and internal structure have been optimized, and special corrosion-resistant treatments can be applied according to your actual working conditions, so that dirt will not easily accumulate and acidic gases will not be able to damage the pump body. Its oil-free operation keeps the extraction environment clean and prevents contamination of downstream processes. Even when working continuously for extended periods, its suction performance remains remarkably stable, and it is unlikely to become less effective over time.

For industries that demand precision and stability, such as chemical engineering, pharmaceuticals, and bioengineering, it can make the entire production process more stable and controllable.

Oil-free operation

The Corrosion Resistant Dry Screw Vacuum Pump uses this corrosion-resistant dry screw vacuum pump, which operates in an oil-free, dry manner. This avoids the oil contamination problems often encountered in traditional oil-lubricated systems. If your production process requires high cleanliness, this oil-free design reduces cleaning work, lowers the probability of rework, and leads to more stable product quality.

Reduced Maintenance Costs

Due to its simple structure and strong corrosion resistance, this series of Corrosion Resistant Dry Screw Vacuum Pumps requires less maintenance during daily use.

Reducing the need for frequent parts replacement and downtime for maintenance helps companies lower long-term operating costs and improve equipment utilization.

PS SERIES DRY SCREW VACUUM PUMP

Main Features

1. Short Gas Path and Reduce the Contamination of Process Gas

Comparing with other types of dry vacuum pump,HANBELL screw vacuum pump has the shortest gas path in the vacuum pump and that could reduce the contamination of process gas. Screw rotors can play as a powder transmission mechanism,we runs well even there has lots of contamination inside the pump.

2. Exellent Pump Performance Due to the Excellent Rotor Profile Sealing Effects

Patented rotor profile can provide rotor excellent sealing effects thus a larger clearance is allowable in between. Pump rotor wearing and rotor jam by the process contamination can be reduced by larger allowable clearance.

3. Simple Structure Reduce the Chance of Unexpected Pump Stop and Easy for Overhaul Process.

Screw type vacuum is composed by a pair of screw rotors and isolation plates are required in different stages of Pumping chamber, Process contamination between rotors and isolation plates can also be avoided. Overhaul Hanbell dry pump is much easier than other type of dry pump, so the repair time is shorter and the cost is saver.

4. Microprocessor Controller and Remote Control Software Can Protect Pump from Abnormal Situations.

Microprocessor controller provides lots of pump parameters for running status monitoring. Pump can be easily operated and monitored by the operation panel. Remote control software can help the customer monitor the pump running status remotely.

Advantages

1. Special coolant is used for cooling, avoiding the possible corrosion of the shell by the cooling water.

2. The mobile operation interface is convenient for operation; it displays the actual working condition of the vacuum pump and can be displayed in both Chinese and English, truly catering to the customers.

3. Military-grade power connector, safe and convenient.

4. Nitrogen heater, making the vacuum pump more suitable for semiconductor processes such as CVD and PECVD.

5. Control signal and communication signal interface, enabling remote monitoring of the vacuum pump.

Corrosion Resistant Dry Screw Vacuum Pump

PS SERIES DRY SCREW VACUUM PUMP

Model		Unit	PS80	PS160	PS180
Pumping Speed(50HZ/60HZ)		L/min	1300/1600	2150/2600	2500/3000
		m³/hr	80/96	140/156	150/180
		cfm	48/57	82/92	88/105
UITimate Pressure		Torr	≤7.5*10^⁻3
		mbar	≤1*10^-2
		Pa	≤1
Motor	Frequency	HZ	50/60
	Voltage	V	220~440
	Power	Hp	4	6	6
		KW	2.98	4.47	4.47
Connection	Inlet		NW50
	Outler		NW40
Cooling Water	Flow	L/min	3~7
	Pressure	kg/cm²	2~4
	Temperature	℃	18~30
	Connection		RC3/8”
N2	Pressure	Mpa	0.15~0.2
	Dilute Flow	L/min	0~60
	Sealing Flow	L/min	0~20
	Connection		Swagelok 1/4”
DIM.LWH		mm	814380663	895405678	920425650
Weight		kg	280	300	320
Noise		dB(A)	≤68	≤70	≤70
			Notes: 1. The noise levels above are for models with a water-cooled motor and no casing. 2. Installing sound insulation devices on the above models can further reduce noise by 3-4 decibels.
Interface			SEMIE73-0299
Pump Leak Rate		Mbar.1/s	1*10^-5
Operation Temp		℃	5~40
Operation Moisture		RH	below 90%

Model		Unit	PS602	PS902	PS1302	PS1802
Pumping Speed (50HZ/60HZ)		L/min	8300/10000	12500/15000	17500/21000	25000/33300
		m³/hr	500/600	750/900	1050/1260	1500/1800
		cfm	294/353	441/530	618/742	883/1060
UITimate Pressure		Torr	≤7.5*10⁻⁴
		mbar	≤1*10⁻³
		Pa	≤0.1
Motor	Frequency	HZ	50/60
	Voltage	V	220~440
	Power	Hp	4+4	6+4	6+6	6+6
		KW	2.98+2.98	4.47+2.98	4.47+4.47	4.47+4.47
Connection	Inlet		IS0100(bolted)		IS0160(bolted)
	Outler		NW40
Cooling Water	Flow	L/min	3~7
	Pressure	kg/cm²	2~4
	Temperature	℃	15~30
	Connection		RC3/8”
N2	Pressure	Mpa	0.15~0.2
	Dilute Flow	L/min	0~60
	Sealing Flow	L/min	0~20
	Connection		Swagelok 1/4”
DIM.LWH		mm	814380865	895380915	920430957	9204301030
Weight		kg	450	520	540	545
Noise		dB(A)	≤70	≤70	≤70	≤70
			Notes: 1. The noise levels above are for models with a water-cooled motor and no casing. 2. Installing sound insulation devices on the above models can further reduce noise by 3-4 decibels.
Interface			SEMIE73-0299
Operation Temp		℃	5~40
Operation Moisture		RH	Below 90%

PS physical dimensions

Corrosion Resistant Dry Screw Vacuum Pump

PD SERIES DRY SCREW VACUUM PUMP

Features

Dry screw vacuum pump ,can be with water-cooled motor (explosion-proof) or aircooled motor (explosion-proof), high pumping speed in high pressure, low power consumption, low noise.

Application

TFT-LCD, Touch Panel

Solar

Metallurgical System

Coating

Plasma processes

Drying Process

Biotech/Pharmaceutical

Chemical Industry

PD Performance parameters

Model		Unit	PD120	PD200	PD300	PD500	PD650	PD800
Pumping Speed (50HZ/60HZ)		L/min	1667/2000	2830/3400	4167/5000	7000/8333	9030/10840	11011/13233
		m³/hr	100/120	167/200	250/300	420/500	540/650	680/800
		cfm	59/71	98/117	147/176	248/295	371/382	393/471
UITimate Pressure		Torr	≤7.5*10^-3
		mbar	≤1*10^-2
		Pa	≤1
Motor	Frequency	HZ	50/60
	Voltage	V	220~380~440
	Power	Hp	4/5.3	6/7.5	8/10	15/20	25/30	25/30
	Power	KW	2.98/4	4.47/5.5	6.7/7.5	11/15	18.5/22	18.5/22
	Power	KW	1.6/2	2.2/3	3.6/4.2	6/7	10/13	11/14
Connection	Inlet		NW50	NW50	ISO63	ISO80	ISO100	ISO100
Connection	Outler		NW40	NW40	NW40	NW50	ISO63	ISO63
Cooling Water	Connection		RC3/8”				RC1/2”
	Pressure	kg/cm²	2.0~4.0
	Temperature	℃	3slm18℃~7slm28℃			6slm18℃~15slm28℃
	Flow	L/min	3slm18℃~7slm28℃			6slm18℃~15slm28℃
N2	Pressure	kg/cm²	0.15~0.2
	Dilute Flow	L/min	By Process
	Sealing Flow	L/min	10
	Connection		Swagelok 1/4”
DIM.LWH		mm	814380663	920430674	1075430650	1346538.4886	1831610735	1831610735
Weight		kg	280	345	390	550	1050	1050
Noise		dB(A)	68	<70	<70	<75	<80	<80
Operation Temp		℃	5~40℃
Operation Moisture		RH	Below 90%