For customers with stable production rhythms and relatively constant vacuum requirements, complex control is not necessary. Yuzhen Fixed Speed Dry Screw Vacuum Pump, with its core advantages of stability, durability, and ease of maintenance, has become a long-term choice for many factories.
The screw rotors in this series are precisely machined, ensuring excellent sealing and continuous, stable pumping. Using a mature and reliable drive method, it starts directly and operates smoothly, reducing unnecessary control complexity. The oil-free structure makes the system cleaner and significantly reduces maintenance frequency, making daily use easier.
Whether for continuous production lines, vacuum furnaces, coating processes, or conventional industrial vacuum applications, this Fixed Speed Dry Screw Vacuum Pump provides stable output, helping companies control equipment investment and long-term maintenance costs while ensuring efficiency.
Yuzhen, relying on Hanbell's mature screw manufacturing technology and strict quality control system, has products that have passed multiple international certifications and have served the global industrial market for a long time. It has also obtained international certifications such as ISO-9001, UL of the United States, CE of Europe, and Lloyd's marine grade of Switzerland.
1. Short Gas Path and Reduce the Contamination of Process Gas
Comparing with other types of dry vacuum pump,HANBELL screw vacuum pump has the shortest gas path in the vacuum pump and that could reduce the contamination of process gas. Screw rotors can play as a powder transmission mechanism,we runs well even there has lots of contamination inside the pump.
2. Excellent Pump Performance Due to the Excellent Rotor Profile Sealing Effects
Patented rotor profile can provide rotor excellent sealing effects thus a larger clearance is allowable in between. Pump rotor wearing and rotor jam by the process contamination can be reduced by larger allowable clearance.
3. Simple Structure Reduce the Chance of Unexpected Pump Stop and Easy for Overhaul Process.
Screw type vacuum is composed by a pair of screw rotors and isolation plates are required in different stages of Pumping chamber, Process contamination between rotors and isolation plates can also be avoided. Overhaul Hanbell dry pump is much easier than other type of dry pump, so the repair time is shorter and the cost is saver.
4. Microprocessor Controller and Remote Control Software Can Protect Pump from Abnormal Situations.
Microprocessor controller provides lots of pump parameters for running status monitoring. Pump can be easily operated and monitored by the operation panel. Remote control software can help the customer monitor the pump running status remotely.
1. Special coolant is used for cooling, avoiding the possible corrosion of the shell by the cooling water.
2. The mobile operation interface is convenient for operation; it displays the actual working condition of the vacuum pump and can be displayed in both Chinese and English, truly catering to the customers.
3. Military-grade power connector, safe and convenient.
4. Nitrogen heater, making the vacuum pump more suitable for semiconductor processes such as CVD and PECVD.
5. Control signal and communication signal interface, enabling remote monitoring of the vacuum pump.
| Model | Unit | PS80 | PS160 | PS180 | |
| Pumping Speed(50HZ/60HZ) | L/min | 1300/1600 | 2150/2600 | 2500/3000 | |
| m³/hr | 80/96 | 140/156 | 150/180 | ||
| cfm | 48/57 | 82/92 | 88/105 | ||
| UITimate Pressure | Torr | ≤7.5*10⁻3 | |||
| mbar | ≤1*10-2 | ||||
| Pa | ≤1 | ||||
| Motor | Frequency | HZ | 50/60 | ||
| Voltage | V | 220~440 | |||
| Power | Hp | 4 | 6 | 6 | |
| KW | 2.98 | 4.47 | 4.47 | ||
| Connection | Inlet | NW50 | |||
| Outler | NW40 | ||||
|
Cooling Water |
Flow | L/min | 3~7 | ||
| Pressure | kg/cm² | 2~4 | |||
| Temperature | ℃ | 18~30 | |||
| Connection | RC3/8” | ||||
| N2 | Pressure | Mpa | 0.15~0.2 | ||
| Dilute Flow | L/min | 0~60 | |||
| Sealing Flow | L/min | 0~20 | |||
| Connection | Swagelok 1/4” | ||||
| DIM.L*W*H | mm | 814*380*663 | 895*405*678 | 920*425*650 | |
| Weight | kg | 280 | 300 | 320 | |
| Noise | dB(A) | ≤68 | ≤70 | ≤70 | |
| Notes: 1. The noise levels above are for models with a water-cooled motor and no casing. 2. Installing sound insulation devices on the above models can further reduce noise by 3-4 decibels. | |||||
| Interface | SEMIE73-0299 | ||||
| Pump Leak Rate | Mbar.1/s | 1*10-5 | |||
| Operation Temp | ℃ | 5~40 | |||
| Operation Moisture | RH | below 90% | |||
| Model | Unit | PS602 | PS902 | PS1302 | PS1802 | |
| Pumping Speed (50HZ/60HZ) | L/min | 8300/10000 | 12500/15000 | 17500/21000 | 25000/33300 | |
| m³/hr | 500/600 | 750/900 | 1050/1260 | 1500/1800 | ||
| cfm | 294/353 | 441/530 | 618/742 | 883/1060 | ||
| UITimate Pressure | Torr | ≤7.5*10⁻⁴ | ||||
| mbar | ≤1*10⁻³ | |||||
| Pa | ≤0.1 | |||||
| Motor | Frequency | HZ | 50/60 | |||
| Voltage | V | 220~440 | ||||
| Power | Hp | 4+4 | 6+4 | 6+6 | 6+6 | |
| KW | 2.98+2.98 | 4.47+2.98 | 4.47+4.47 | 4.47+4.47 | ||
| Connection | Inlet | IS0100(bolted) | IS0160(bolted) | |||
| Outler | NW40 | |||||
|
Cooling Water |
Flow | L/min | 3~7 | |||
| Pressure | kg/cm² | 2~4 | ||||
| Temperature | ℃ | 15~30 | ||||
| Connection | RC3/8” | |||||
| N2 | Pressure | Mpa | 0.15~0.2 | |||
| Dilute Flow | L/min | 0~60 | ||||
| Sealing Flow | L/min | 0~20 | ||||
| Connection | Swagelok 1/4” | |||||
| DIM.L*W*H | mm | 814*380*865 | 895*380*915 | 920*430*957 | 920*430*1030 | |
| Weight | kg | 450 | 520 | 540 | 545 | |
| Noise | dB(A) | ≤70 | ≤70 | ≤70 | ≤70 | |
| Notes: 1. The noise levels above are for models with a water-cooled motor and no casing. 2. Installing sound insulation devices on the above models can further reduce noise by 3-4 decibels. | ||||||
| Interface | SEMIE73-0299 | |||||
| Operation Temp | ℃ | 5~40 | ||||
| Operation Moisture | RH | Below 90% | ||||
Dry screw vacuum pump ,can be with water-cooled motor (explosion-proof) or aircooled motor (explosion-proof), high pumping speed in high pressure, low power consumption, low noise.
TFT-LCD, Touch Panel
Solar
Metallurgical System
Coating
Plasma processes
Drying Process
Biotech/Pharmaceutical
Chemical Industry
| Model | Unit | PD120 | PD200 | PD300 | PD500 | PD650 | PD800 | |
| Pumping Speed (50HZ/60HZ) | L/min | 1667/2000 | 2830/3400 | 4167/5000 | 7000/8333 | 9030/10840 | 11011/13233 | |
| m³/hr | 100/120 | 167/200 | 250/300 | 420/500 | 540/650 | 680/800 | ||
| cfm | 59/71 | 98/117 | 147/176 | 248/295 | 371/382 | 393/471 | ||
| UITimate Pressure | Torr | ≤7.5*10-3 | ||||||
| mbar | ≤1*10-2 | |||||||
| Pa | ≤1 | |||||||
| Motor | Frequency | HZ | 50/60 | |||||
| Voltage | V | 220~380~440 | ||||||
| Power | Hp | 4/5.3 | 6/7.5 | 8/10 | 15/20 | 25/30 | 25/30 | |
| KW | 2.98/4 | 4.47/5.5 | 6.7/7.5 | 11/15 | 18.5/22 | 18.5/22 | ||
| Power | KW | 1.6/2 | 2.2/3 | 3.6/4.2 | 6/7 | 10/13 | 11/14 | |
| Connection | Inlet | NW50 | NW50 | ISO63 | ISO80 | ISO100 | ISO100 | |
| Outler | NW40 | NW40 | NW40 | NW50 | ISO63 | ISO63 | ||
|
Cooling Water |
Connection | RC3/8” | RC1/2” | |||||
| Pressure | kg/cm² | 2.0~4.0 | ||||||
| Temperature | ℃ | 3slm18℃~7slm28℃ | 6slm18℃~15slm28℃ | |||||
| Flow | L/min | |||||||
| N2 | Pressure | kg/cm² | 0.15~0.2 | |||||
| Dilute Flow | L/min | By Process | ||||||
| Sealing Flow | L/min | 10 | ||||||
| Connection | Swagelok 1/4” | |||||||
| DIM.L*W*H | mm | 814*380*663 | 920*430*674 | 1075*430*650 | 1346*538.4*886 | 1831*610*735 | 1831*610*735 | |
| Weight | kg | 280 | 345 | 390 | 550 | 1050 | 1050 | |
| Noise | dB(A) | 68 | <70 | <70 | <75 | <80 | <80 | |
| Operation Temp | ℃ | 5~40℃ | ||||||
| Operation Moisture | RH | Below 90% | ||||||

1. The PR pumps have a high quality ,oil-free pumping mechanism.
2. Excellent pump performance due to the excellent rator profile sealing effects.
3. Operating at relatively low pressures make it highly reliable
4. Quiet, vibration free operation
Vacuum coating, Vacuum oven, Thermal process, Pharmaceutical, Chemical, Semlconductor, TFT/LCD/LED and Solar cell, etc..
| Model | Unit | PR600 | PR900 | PR1300 | PR1800 | PR3000 | PR7000 | |
| Pumping Speed(50HZ/60HZ) | L/min | 13000 | 20000 | 26000 | 33000 | 63000 | 140000 | |
| m³/hr | 800 | 1200 | 1600 | 2000 | 3800 | 8400 | ||
| cfm | 470 | 706 | 941 | 1176 | 2235 | 4947 | ||
| UITimate Pressure | Torr | ≤7.5*10⁴ | ||||||
| mbar | ≤1*10⁻³ | |||||||
| Pa | ≤0.1 | |||||||
| Motor | Frequency | HZ | 50/60 | |||||
| Voltage | V | 220~440 | ||||||
| Power | Hp | 4 | 4 | 6 | 6 | 8/20 | 20 | |
| KW | 2.98 | 2.98 | 4.47 | 4.47 | 6.7/15 | 15 | ||
| Idle power consumption | KW | 1.7 | ||||||
| Connection | Inlet | IS0100 | ISO160 | ISO200 | 320 ISO-K | |||
| Outler | IS0063 | ISO100 | IS0160 | 160 ISO-K | ||||
| DIM.L*W*H |
mm |
721*322*233 |
778*360*250 |
848*360*272 |
778*360*272 |
1142*510*358 | 1490*669*490 | |
| Weight | kg | 160 | 210 |
220 |
225 |
570 | 880 | |
| Noise | dB(A) |
≤60 |
≤60 |
≤62 |
≤62 |
≤65 |
≤70 |
|
| Notes: 1. The noise levels above are for models with a water-cooled motor and no casing. 2. Installing sound insulation devices on the above models can further reduce noise by 3-4 decibels. | ||||||||
| Pump Leak Rate | Mbar.1/s | 1*10⁵ | ||||||
| Operation Temp ℃ | ℃ | 5~40 | ||||||
| Operation Moisture RH | RH | Below 90% | ||||||
Address
567 Songwei North Road, Songjiang District, Shanghai, China
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