Variable Frequency Dry Screw Vacuum Pump

Yuzhen High-Quality Variable Frequency Dry Screw Vacuum Pump can automatically adjust its speed according to on-site working conditions, using only the necessary power, resulting in greater energy savings and flexibility. It is particularly suitable for production lines with frequent process changes and demanding requirements for energy consumption and stability.

Send Inquiry

Product Description

In many factories, vacuum requirements are not constant.

Some processes require high vacuum, while others only need to maintain a certain state. If the equipment runs at full speed continuously, electricity costs will be high, and equipment wear will be accelerated.

The advantage of the Variable Frequency Dry Screw Vacuum Pump lies in this –

It doesn't operate at full capacity all the time, but automatically adjusts its speed according to actual needs. The vacuum pump works on demand, saving electricity and avoiding unnecessary work.

When the system load is low, the vacuum pump automatically slows down, reducing unnecessary energy consumption;

If the process requires greater pumping capacity, it can quickly respond, ensuring that the production rhythm is not disrupted.

This variable frequency control method not only significantly reduces electricity costs but also makes the entire system run more smoothly and quietly. In the long run, it also protects the equipment itself.

Easy Management

The Variable Frequency Dry Screw Vacuum Pump features an intuitive control interface, allowing users to easily understand the operating status and parameters at a glance. Operators don't require specialized, complex training; it's very easy to use, and daily adjustments and monitoring are convenient.

Typical Application Scenarios

Semiconductor and electronics manufacturing: Etching, CVD, PECVD, and other processes

Photovoltaic and LED production lines: Thin film deposition, cleaning and evacuation

Chemical processes: Gas treatment, vacuum reaction, solvent recovery

Coating, plating, and high-cleanliness industrial applications

PS SERIES DRY SCREW VACUUM PUMP

Main Features

1. Short Gas Path and Reduce the Contamination of Process Gas

Comparing with other types of dry vacuum pump, HANBELL screw vacuum pump has the shortest gas path in the vacuum pump and that could reduce the contamination of process gas. Screw rotors can play as a powder transmission mechanism, we run well even there has lots of contamination inside the pump.

2. Excellent Pump Performance Due to the Excellent Rotor Profile Sealing Effects

Patented rotor profile can provide rotor excellent sealing effects thus a larger clearance is allowable in between. Pump rotor wearing and rotor jam by the process contamination can be reduced by larger allowable clearance.

3. Simple Structure Reduce the Chance of Unexpected Pump Stop and Easy for Overhaul Process.

Screw type vacuum is composed by a pair of screw rotors and isolation plates are required in different stages of Pumping chamber, Process contamination between rotors and isolation plates can also be avoided. Overhaul Hanbell dry pump is much easier than other type of dry pump, so the repair time is shorter and the cost is saver.

4. Microprocessor Controller and Remote Control Software Can Protect Pump from Abnormal Situations.

Microprocessor controller provides lots of pump parameters for running status monitoring. Pump can be easily operated and monitored by the operation panel. Remote control software can help the customer monitor the pump running status remotely.

Advantages

1. Special coolant is used for cooling, avoiding the possible corrosion of the shell by the cooling water.

2. The mobile operation interface is convenient for operation; it displays the actual working condition of the vacuum pump and can be displayed in both Chinese and English, truly catering to the customers.

3. Military-grade power connector, safe and convenient.

4. Nitrogen heater, making the vacuum pump more suitable for semiconductor processes such as CVD and PECVD.

5. Control signal and communication signal interface, enabling remote monitoring of the vacuum pump.

Variable Frequency Dry Screw Vacuum Pump

PS SERIES DRY SCREW VACUUM PUMP

Model		Unit	PS80	PS160	PS180
Pumping Speed(50HZ/60HZ)		L/min	1300/1600	2150/2600	2500/3000
		m³/hr	80/96	140/156	150/180
		cfm	48/57	82/92	88/105
UITimate Pressure		Torr	≤7.5*10^⁻3
		mbar	≤1*10^-2
		Pa	≤1
Motor	Frequency	HZ	50/60
	Voltage	V	220~440
	Power	Hp	4	6	6
		KW	2.98	4.47	4.47
Connection	Inlet		NW50
	Outler		NW40
Cooling Water	Flow	L/min	3~7
	Pressure	kg/cm²	2~4
	Temperature	℃	18~30
	Connection		RC3/8”
N2	Pressure	Mpa	0.15~0.2
	Dilute Flow	L/min	0~60
	Sealing Flow	L/min	0~20
	Connection		Swagelok 1/4”
DIM.LWH		mm	814380663	895405678	920425650
Weight		kg	280	300	320
Noise		dB(A)	≤68	≤70	≤70
			Notes: 1. The noise levels above are for models with a water-cooled motor and no casing. 2. Installing sound insulation devices on the above models can further reduce noise by 3-4 decibels.
Interface			SEMIE73-0299
Pump Leak Rate		Mbar.1/s	1*10^-5
Operation Temp		℃	5~40
Operation Moisture		RH	below 90%

Model		Unit	PS602	PS902	PS1302	PS1802
Pumping Speed (50HZ/60HZ)		L/min	8300/10000	12500/15000	17500/21000	25000/33300
		m³/hr	500/600	750/900	1050/1260	1500/1800
		cfm	294/353	441/530	618/742	883/1060
UITimate Pressure		Torr	≤7.5*10⁻⁴
		mbar	≤1*10⁻³
		Pa	≤0.1
Motor	Frequency	HZ	50/60
	Voltage	V	220~440
	Power	Hp	4+4	6+4	6+6	6+6
		KW	2.98+2.98	4.47+2.98	4.47+4.47	4.47+4.47
Connection	Inlet		IS0100(bolted)		IS0160(bolted)
	Outler		NW40
Cooling Water	Flow	L/min	3~7
	Pressure	kg/cm²	2~4
	Temperature	℃	15~30
	Connection		RC3/8”
N2	Pressure	Mpa	0.15~0.2
	Dilute Flow	L/min	0~60
	Sealing Flow	L/min	0~20
	Connection		Swagelok 1/4”
DIM.LWH		mm	814380865	895380915	920430957	9204301030
Weight		kg	450	520	540	545
Noise		dB(A)	≤70	≤70	≤70	≤70
			Notes: 1. The noise levels above are for models with a water-cooled motor and no casing. 2. Installing sound insulation devices on the above models can further reduce noise by 3-4 decibels.
Interface			SEMIE73-0299
Operation Temp		℃	5~40
Operation Moisture		RH	Below 90%

PS physical dimensions

Variable Frequency Dry Screw Vacuum Pump

PD SERIES DRY SCREW VACUUM PUMP

Features

Dry screw vacuum pump ,can be with water-cooled motor (explosion-proof) or aircooled motor (explosion-proof), high pumping speed in high pressure, low power consumption, low noise.

Application

TFT-LCD, Touch Panel

Solar

Metallurgical System

Coating

Plasma processes

Drying Process

Biotech/Pharmaceutical

Chemical Industry

PD Performance parameters

Model		Unit	PD120	PD200	PD300	PD500	PD650	PD800
Pumping Speed (50HZ/60HZ)		L/min	1667/2000	2830/3400	4167/5000	7000/8333	9030/10840	11011/13233
		m³/hr	100/120	167/200	250/300	420/500	540/650	680/800
		cfm	59/71	98/117	147/176	248/295	371/382	393/471
UITimate Pressure		Torr	≤7.5*10^-3
		mbar	≤1*10^-2
		Pa	≤1
Motor	Frequency	HZ	50/60
	Voltage	V	220~380~440
	Power	Hp	4/5.3	6/7.5	8/10	15/20	25/30	25/30
	Power	KW	2.98/4	4.47/5.5	6.7/7.5	11/15	18.5/22	18.5/22
	Power	KW	1.6/2	2.2/3	3.6/4.2	6/7	10/13	11/14
Connection	Inlet		NW50	NW50	ISO63	ISO80	ISO100	ISO100
Connection	Outler		NW40	NW40	NW40	NW50	ISO63	ISO63
Cooling Water	Connection		RC3/8”				RC1/2”
	Pressure	kg/cm²	2.0~4.0
	Temperature	℃	3slm18℃~7slm28℃			6slm18℃~15slm28℃
	Flow	L/min	3slm18℃~7slm28℃			6slm18℃~15slm28℃
N2	Pressure	kg/cm²	0.15~0.2
	Dilute Flow	L/min	By Process
	Sealing Flow	L/min	10
	Connection		Swagelok 1/4”
DIM.LWH		mm	814380663	920430674	1075430650	1346538.4886	1831610735	1831610735
Weight		kg	280	345	390	550	1050	1050
Noise		dB(A)	68	<70	<70	<75	<80	<80
Operation Temp		℃	5~40℃
Operation Moisture		RH	Below 90%

PD Performance Curve

Variable Frequency Dry Screw Vacuum Pump

PD Dimensions

Variable Frequency Dry Screw Vacuum Pump

PD Series

Product	Unit	PD300	PD500	PD1902	PD2152	PD3052	PD3652
Dry Pump	m³/hr	330	500	330	500	500	500
Booster Pump	m³/hr			1800	1800	3000	3600
Max.Pumping Speed	m³/hr	330	500	1900	2100	3000	3600
Max.Pumping Speed	l/min	5500	8300	32000	35000	50000	60000
Ultimate Pressure	Torr	7.5X10^-3	7.5X10^-3	7.5X10^-4	7.5X10^-4	7.5X10^-4	7.5X10^-4
Power Consumption	kW	4.5	7.7	5.3	8.5	8.8	9.0
Inlet	SO	63	80	160	160	200	200
Outlet	NW	40	50	40	50	50	50
Dimension(mm)	L	1055	1505	1055	1505	1505	1505
	W	430	525	430	525	525	525
	H	560	515	1055	790	965	965
Weight	Kg	350	500	560	730	1000	1020

PR SERIES ROOTS PUMP

Features

1. The PR pumps have a high quality ,oil-free pumping mechanism.

2. Excellent pump performance due to the excellent rator profile sealing effects.

3. Operating at relatively low pressures make it highly reliable

4. Quiet, vibration free operation

Application field

Vacuum coating, Vacuum oven, Thermal process, Pharmaceutical, Chemical, Semlconductor, TFT/LCD/LED and Solar cell, etc..

PR Performance parameters

Model		Unit	PR600	PR900	PR1300	PR1800	PR3000	PR7000
Pumping Speed(50HZ/60HZ)		L/min	13000	20000	26000	33000	63000	140000
		m³/hr	800	1200	1600	2000	3800	8400
		cfm	470	706	941	1176	2235	4947
UITimate Pressure		Torr	≤7.5*10⁴
		mbar	≤1*10⁻³
		Pa	≤0.1
Motor	Frequency	HZ	50/60
	Voltage	V	220~440
	Power	Hp	4	4	6	6	8/20	20
	Power	KW	2.98	2.98	4.47	4.47	6.7/15	15
Idle power consumption		KW						1.7
Connection	Inlet		IS0100		ISO160		ISO200	320 ISO-K
Connection	Outler		IS0063		ISO100		IS0160	160 ISO-K
DIM.LWH		mm	721322233	778360250	848360272	778360272	1142510358	1490669490
Weight		kg	160	210	220	225	570	880
Noise		dB(A)	≤60	≤60	≤62	≤62	≤65	≤70
Noise		dB(A)	Notes: 1. The noise levels above are for models with a water-cooled motor and no casing. 2. Installing sound insulation devices on the above models can further reduce noise by 3-4 decibels.
Pump Leak Rate		Mbar.1/s	1*10⁵
Operation Temp ℃		℃	5~40
Operation Moisture RH		RH	Below 90%

PMF Semiconductor Energy-Saving Series

Model		Unit	PMF100	PMF120	PMF612
Pumping Speed		L/min	1666	1933	10000
		m³/hr	100	116	600
		cfm	59	69	353
Ultimate Pressure		Torr	≤7.5×10^-3	≤7.5×10^-3	≤7.5×10^-4
Ultimate Pressure		mbar	≤1×10^-2	≤1×10^-2	≤1×10^-3
Motor	Voltage	V	220V/380V	220V/380V	220V/380V
Motor	Rated Power	kW	2.2	2.2	2.2+2.2
Connection	Inlet		NW50	NW50	ISO80
Connection	Outlet		NW25	NW25	NW40
Cooling Water Dim.	Pressure	kg/cm²	2.0-4.0(△P>1kg/cm²)	2.0-4.0(△P>1kg/cm²)	2.0-4.0(△P>1kg/cm²)
	Min.Flow	L/min	1	1	1
	Temp	℃	20℃ 2L/min~30℃ 5L/min	20℃ 2Lmin~30℃ 5L/min	20℃ 2L/min~30℃ 5L/min
	Comection		RC1/4"	RC1/4"	RC1/4"
	L×W×H	mm	450×230×275	450×230×275	530×230×520
Weight		kg	60	60	120
Nosice		dB	60	60	60
UItimate Pressure Power		kW	0.39	0.44	0.5

IPH Series

Product	Unit	iPH100	iPH200	iPH610	iPH1210	iPH1210H	iPH1220	iPH1810	iPH1820
Dry Pump	m³/h	120	200	120	120	120	200	120	200
Booster	m³/h	1	I	600	1200	1200	1200	1800	1800
Max.Pumping Speed	m³/h	120	200	700	1100	1100	1250	1800	1850
Ultimate Pressure	Torr	7.5×10^-3	7.5×10^-3	7.5×10^-4	7.5×10^-4	7.5×10^-4	7.5×10^-4	7.5×10^-4	7.5×10^-4
System Power at UIt.	kW	2.1	3.5	2.6	3.0	3.2	4.5	3.9	4.7
Inlet	ISO	63	63	100	100	100	100	160	160
Outlet	NW	40	40	40	40	40	40	40	40
Dimension(mm)	L	830	830	830	830	830	830	830	830
	W	400	400	400	400	400	400	400	400
	H	526	526	780	780	780	780	830	830
Weight	Kg	280	300	450	455	460	470	515	530